School of Engineering \ Material Science and Nanotechnology Engineering
Course Credit
ECTS Credit
Course Type
Instructional Language
Programs that can take the course
Can be taken as faculty elective course by the other engineering departments
This course covers the synthesis of nanomaterials using bottom-up and top-down engineering approaches. The techniques discussed in detail include photolithography, electron beam lithography, nanoimprint lithography, chemical and physical vapor deposition, plasma and plasma etching, template synthesis method, sol-gel method, metal reduction method, and emulsion polymerization.
Textbook and / or References
1. Marc. Madou Fundamentals of Microfabrication
2. Current Articles
1. Gain knowledge about nanomaterials.
2. Learn the design and production methods of nanomaterials to develop solutions for current problems encountered in Materials Science and Nanotechnology Engineering.
1. Gaining knowledge about nanomaterial production methods and classification fundamentals.
2. Understanding nano-fabrication methods using lithographic techniques.
3. Comprehending the fundamentals of nano-fabrication through Chemical and Physical Vapor Deposition and distinguishing their differences.
4. Learning plasma formation and acquiring knowledge about plasma-based nanofabrication.
5. Understanding membranes, template synthesis methods, pattern replication, and their applications in devices through examples.
6. Understanding bottom-up nanofabrication principles in wet-lab-based techniques and grasping the principles of different methods such as sol-gel, emulsion polymerization, and co-precipitation.
7. Forming groups and delivering presentations on a selected topic.
Week 1: Introduction to Nano-fabrication and Classifications
Week 2: Nanoimprint Lithography-Based Manufacturing and Applications
Week 3: Photolithography-Based Manufacturing Methods and Applications
Week 4: Electron Beam Lithography and Applications
Week 5: Chemical Vapor Deposition Techniques and Applications
Week 6: Physical Vapor Deposition Techniques and Applications
Week 7: Plasma and Pattern Transfer Applications
Week 8: Pattern Transfer Applications
Week 9: Membrane-Based Techniques and AAO Applications
Week 10: Bottom-Up Nanomaterial Production Methods
Week 11: Silica and Polymeric Nanomaterial Production and Applications
Week 12: Magnetic and Metallic Nanomaterial Production and Applications
Tentative Assesment Methods
Presentation: 50 %
Midterms: 30 %
Pop-quiz: 10 %
Final: 10 %
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